STORAGE OF CALIBRATION WAFER STANDARDS PRODUCED WITH PARTICLE SIZES < 100 NM.
What is the best method to store Calibration Wafer Standards produced with particle sizes of less than 100 nm? Cleanrooms normally operate at 70F, about 21C, and typically around 40% humidity. When using a Calibration Wafer Standard to calibrate your Wafer Inspections Systems in the lab, the particle sizes deposited on the wafer standard under […]